SAMPLE OBSERVATION DEVICE - HITACHI HIGH TECH CORP

Title:

SAMPLE OBSERVATION DEVICE

Document Type and Number:

WIPO Patent Application WO/2021/059321

Kind Code:

A1

Abstract:

This sample observation device includes: a microscope which irradiates a sample with a probe, detects signals from the sample, and outputs the detected signals; and a system for generating images from the detected signals received from the microscope. The system receives a user instruction pertaining to one or more trained models in a model database storing data on multiple trained models by which high-quality images are estimated from a low-quality image. The system generates and displays a current low-quality observation image from the detected signals and estimates and displays high-quality images from the current low-quality observation image by using the one or more trained models, respectively.

Inventors:

OOTSUGA KAZUO (JP)
NANRI TERUTAKA (JP)
KOMATSUZAKI RYO (JP)
CHIBA HIROYUKI (JP)

Application Number:

PCT/JP2019/037191

Publication Date:

April 01, 2021

Filing Date:

September 24, 2019

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

H01J37/22; H01J37/28

Foreign References:

JP2018137275A	2018-08-30
JP2019111322A	2019-07-11