Title:
SCANNED ANTENNA AND METHOD OF MANUFACTURING SCANNED ANTENNA
Document Type and Number:
WIPO Patent Application WO/2018/131635
Kind Code:
A1
Abstract:
A scanned antenna (1000) comprises: a TFT substrate (101) including a plurality of TFTs and a plurality of patch electrodes (15) supported by a first dielectric substrate (1); a slot substrate (201C) including a slot electrode (55) supported by a second dielectric substrate (51); a liquid crystal layer provided between the TFT substrate and the slot substrate; and a reflecting conductor plate (65) arranged to face the second dielectric substrate across a dielectric layer. The slot electrode (55) includes a plurality of slots (57) arranged to correspond to the plurality of patch electrodes (15). The patch electrodes (15) are connected to the drains of corresponding TFTs. The slot electrodes (55) include a Cu layer (55MC, 55MD), and a lower metal layer (55LC, 55LD) and/or an upper metal layer (55UD). The lower metal layer and/or the upper metal layer reduces the tensile stress of the Cu layer by at least approximately half.
Inventors:
ORUI TAKATOSHI
OHTAKE TADASHI
NAKAMURA WATARU
MINOURA KIYOSHI
KITOH KENICHI
OHTAKE TADASHI
NAKAMURA WATARU
MINOURA KIYOSHI
KITOH KENICHI
Application Number:
PCT/JP2018/000432
Publication Date:
July 19, 2018
Filing Date:
January 11, 2018
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01Q3/34; G02F1/13; G02F1/1333; G02F1/1343; H01L29/786; H01Q3/44; H01Q13/22; H01Q21/06; G02F1/1368
Domestic Patent References:
| WO2015126578A1 | 2015-08-27 |
Foreign References:
| JPH04234202A | 1992-08-21 | |||
| JP2009538565A | 2009-11-05 | |||
| JP2000022428A | 2000-01-21 | |||
| JP2011199192A | 2011-10-06 |
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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