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Patent Searching and Data


Title:
SCRIBE HEAD AND SCRIBE DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/066411
Kind Code:
A1
Abstract:
The purpose of the present invention is to prevent a force in an axis crossing direction from being applied to a rod during scribe processing. A scribe head (1) according to the present invention is provided with: a holder holding member (6) that holds a scribing tool (4); an air cylinder (3) that causes the holder holding member (6) to come close to and get away from an object to be processed; and a support body (7) that supports the holder holding member (6) and the air cylinder (3). The air cylinder (3) has a cylinder body (3b) and a shaft body retractable from the cylinder body (3b). The shaft body is configured to be air-sealed to the cylinder body (3b). The holder holding member (6) comes close to the object to be processed when the shaft body moves out from the cylinder body (3b) and gets away from the object to be processed when the shaft body moves back to the cylinder body (3b). The tip of the shaft body and the holder holding member (6) are not connected to each other, and only a force along the longitudinal direction of the shaft body is configured to be transmittable to the holder holding member (6).

Inventors:
NAKAGAKI TOMOKI (JP)
Application Number:
PCT/JP2019/033258
Publication Date:
April 02, 2020
Filing Date:
August 26, 2019
Export Citation:
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Assignee:
MITSUBOSHI DIAMOND IND CO LTD (JP)
International Classes:
B28D5/00; C03B33/027; H01L21/301
Foreign References:
JP2014088295A2014-05-15
JPS5452113A1979-04-24
JPH09295822A1997-11-18
JP2002321933A2002-11-08
Attorney, Agent or Firm:
YASUDA MIKIO (JP)
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