Title:
SEED STRUCTURES FOR STRUCTURED COATINGS FOR OPTICAL AND OTHER DEVICES
Document Type and Number:
WIPO Patent Application WO/2020/229563
Kind Code:
A3
Abstract:
A method includes providing a coating over a surface of a substrate, a plurality of seed structures being disposed on the surface of the substrate, in which respective heights of the seed structures define local thicknesses of the coating. An optical device includes a substrate, a plurality of seed structures on a surface of the substrate, and a coating on the seed structures and on the surface of the substrate, in which respective heights of the seed structures define local thicknesses of the coating.
Inventors:
HANSSON NIKLAS (SE)
QUAADE ULRICH (DK)
QUAADE ULRICH (DK)
Application Number:
PCT/EP2020/063383
Publication Date:
December 30, 2020
Filing Date:
May 13, 2020
Export Citation:
Assignee:
NIL TECH APS (DK)
International Classes:
C23C16/01; C23C14/00; C23C14/04; C23C16/04; C23C16/455; G02B1/10; G02B5/18; G03F7/00
Domestic Patent References:
| WO2018220269A1 | 2018-12-06 | |||
| WO2017176921A1 | 2017-10-12 |
Foreign References:
| US20180059291A1 | 2018-03-01 |
Other References:
RIZWAN ALI ET AL: "Fabrication of buried nanostructures by atomic layer deposition", SCIENTIFIC REPORTS, vol. 8, no. 1, 10 October 2018 (2018-10-10), XP055719818, DOI: 10.1038/s41598-018-33036-3
Attorney, Agent or Firm:
KUNZ, Herbert (DE)
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