Title:
SELECTIVE LASER TRANSFER DEVICE AND TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2021/080327
Kind Code:
A1
Abstract:
A multi-beam-generation-based laser transfer device according to one embodiment of the present invention comprises: a laser oscillator which generates a laser beam; an active multi-beam optical system which divides the laser beam into multiple beams and selectively opens and closes each of individual elements of the multiple beams; a stage which transfers a transfer substrate and a target substrate in a biaxial direction; and a controller which sets the position of a transfer target point and transmits a position signal to the active multi-beam optical system and the stage so as to control the driving of the stage and the opening/closing of the multiple beams according to the position signal.
Inventors:
KIM SEUNG MAN (KR)
HAN SEONG HEUM (KR)
LEE JAE-HAK (KR)
SONG JOONYUB (KR)
PARK AH-YOUNG (KR)
HAN SEONG HEUM (KR)
LEE JAE-HAK (KR)
SONG JOONYUB (KR)
PARK AH-YOUNG (KR)
Application Number:
PCT/KR2020/014432
Publication Date:
April 29, 2021
Filing Date:
October 21, 2020
Export Citation:
Assignee:
KOREA INST MACH & MATERIALS (KR)
International Classes:
H01L21/50; B23K26/20; H01L21/263; H01L21/66; H01L21/67; H01L25/075; H01L33/00; H01S3/00
Foreign References:
| KR20190109078A | 2019-09-25 | |||
| KR20190009742A | 2019-01-29 | |||
| KR20180070326A | 2018-06-26 | |||
| KR20090033211A | 2009-04-01 | |||
| KR20180136273A | 2018-12-24 |
Attorney, Agent or Firm:
PANKOREA PATENT AND LAW FIRM (KR)
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