Title:
SEMICONDUCTOR STORAGE RACK CLEANING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/022046
Kind Code:
A1
Abstract:
A semiconductor storage rack cleaning system (100), with a semiconductor storage rack (200) being provided with a plurality of stage positions (5), and the semiconductor storage rack cleaning system (100) comprising a conveying device (1) and a cleaning device (2), wherein the cleaning device (2) is used for cleaning each of the stage positions (5) of the semiconductor storage rack (200); the cleaning device (2) is detachably connected to the conveying device (1); and the conveying device (1) is used for conveying the cleaning device (2) to each of the stage positions (5) of the semiconductor storage rack (200).
Inventors:
WANG YIMO (CN)
Application Number:
PCT/CN2021/096934
Publication Date:
February 03, 2022
Filing Date:
May 28, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B08B1/04; B08B1/00; B08B13/00; B08B15/04; B65G47/90
Domestic Patent References:
| WO2018142389A1 | 2018-08-09 |
Foreign References:
| CN111014214A | 2020-04-17 | |||
| CN206854321U | 2018-01-09 | |||
| CN209565349U | 2019-11-01 | |||
| CN210207981U | 2020-03-31 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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