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Title:
SHEET FOR PRODUCTION OF SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/193942
Kind Code:
A1
Abstract:
A sheet for the production of a semiconductor device, said sheet being provided with a base material, an adhesive layer, an intermediate layer and a film-form adhesive, while having a configuration wherein the adhesive layer, the intermediate layer and the film-form adhesive are sequentially superposed on the base material in this order. The base material, the adhesive layer, the intermediate layer and the film-form adhesive are concentrically arranged; the maximum value of the width of the intermediate layer is smaller than the maximum value of the width of the adhesive layer and the maximum value of the width of the base material; the maximum value of the width of the film-form adhesive is smaller than the maximum value of the width of the adhesive layer and the maximum value of the width of the base material; the intermediate layer contains, as a main component, a non-silicon resin that has a weight average molecular weight of 100,000 or less; one or more components selected from the group consisting of the intermediate layer and the film-form adhesive have a total light transmittance of 60% or less; and the total light transmittance of one or more components selected from the group consisting of the intermediate layer and the film-form adhesive is less than the total light transmittance of a supporting sheet, which is composed of the base material and the adhesive layer.

Inventors:
IWAYA WATARU (JP)
SATO YOSUKE (JP)
Application Number:
PCT/JP2021/012955
Publication Date:
September 30, 2021
Filing Date:
March 26, 2021
Export Citation:
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Assignee:
LINTEC CORP (JP)
International Classes:
B32B27/00; B32B27/28; C08L31/04; C08L83/04; H01L21/301
Domestic Patent References:
WO2018083982A12018-05-11
Foreign References:
JP2013199562A2013-10-03
JP2005248018A2005-09-15
JP2011111530A2011-06-09
JP2012080023A2012-04-19
JP2012190992A2012-10-04
JP2019046827A2019-03-22
JP2012119395A2012-06-21
JP2017103471A2017-06-08
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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