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Patent Searching and Data


Title:
SILICON SINGLE CRYSTAL PULL-UP APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/013719
Kind Code:
A1
Abstract:
Provided is a silicon single crystal pull-up apparatus in which the airtightness of a connection means for connecting a sample tube and a supply tube is improved and a sublimable dopant is prevented from leaking from the connection means. A silicon single crystal pull-up apparatus (1) includes a pull-up furnace (2), a sample chamber (20) in which a sublimable dopant (23) is housed, a sample tube (21) which can be raised and lowered between the interior of the sample chamber (20) and the interior of the pull-up furnace (2), a raising and lowering means (25) for raising and lowering the sample tube (21), a supply tube (22) which is installed inside the pull-up furnace (2) and supplies the sublimable dopant (23) to a melt (5), and a bonding means for bonding the sample tube (21) and the supply tube (22). The bonding means is constructed from a ball joint structure comprising a convex member (211) which projects from one end of the sample tube (21) and a concave member (221) which is provided at one end of the supply tube (22) and is formed to be engageable with the convex member (211). The contact surfaces of the convex member (211) and the concave member (221) are formed to be curved surfaces, and a flow path is formed between the sample tube (21) and the supply tube (22).

Inventors:
NARUSHIMA YASUHITO (JP)
KAWAZOE SHINICHI (JP)
OGAWA FUKUO (JP)
KUBOTA TOSHIMICHI (JP)
FUKUDA TOMOHIRO (JP)
Application Number:
PCT/JP2009/063440
Publication Date:
February 04, 2010
Filing Date:
July 28, 2009
Export Citation:
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Assignee:
SUMCO TECHXIV CORP (JP)
NARUSHIMA YASUHITO (JP)
KAWAZOE SHINICHI (JP)
OGAWA FUKUO (JP)
KUBOTA TOSHIMICHI (JP)
FUKUDA TOMOHIRO (JP)
International Classes:
C30B15/04
Foreign References:
JPS61227986A1986-10-11
JPS5988394A1984-05-22
JP2005336020A2005-12-08
JPH09227275A1997-09-02
JP2005336020A2005-12-08
Other References:
See also references of EP 2330234A4
Attorney, Agent or Firm:
SHOBAYASHI, Masayuki et al. (JP)
Right wood Masayuki (JP)
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