Title:
SILICONE POLYMER COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2017/217175
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a silicone polymer composition which has a low added quantity of organic acids and exhibits good stability, and therefore does not cause fluctuations in lithography performance over a long period of time and can obtain a stabilized high resolution patterned form. Provided is a silicone polymer composition characterized by comprising a silicone polymer represented by formula (1) and an organic acid, with the organic acid being contained at a quantity of 0.0001-0.03 parts by weight relative to 100 parts by weight of the silicone polymer. (In the formula, R1 and R2 are different from each other and are a hydrocarbon group, a glycidyl group or a methacryloyl group, and a, b and c each denote molar percentages and are such that a is 0-100 mol.%, b is 0-90 mol.%, c is 0-100 mol.%, and a+b+c=100.)
Inventors:
MIZUTA MASAYUKI (JP)
KATO HIDETOSHI (JP)
SEKI HIROYASU (JP)
KOBAYASHI HISATAKE (JP)
KATO HIDETOSHI (JP)
SEKI HIROYASU (JP)
KOBAYASHI HISATAKE (JP)
Application Number:
PCT/JP2017/018477
Publication Date:
December 21, 2017
Filing Date:
May 17, 2017
Export Citation:
Assignee:
TORAY FINECHEMICALS CO LTD (JP)
International Classes:
C08L83/04; C08K5/09
Domestic Patent References:
| WO2007114253A1 | 2007-10-11 |
Foreign References:
| JP2015189856A | 2015-11-02 | |||
| JP2008019423A | 2008-01-31 | |||
| JP2009030006A | 2009-02-12 | |||
| JP2009030007A | 2009-02-12 | |||
| JP2010085912A | 2010-04-15 | |||
| JPH08302200A | 1996-11-19 | |||
| JP2003206403A | 2003-07-22 | |||
| JP2013512994A | 2013-04-18 | |||
| JPH08176509A | 1996-07-09 |
Attorney, Agent or Firm:
SEIRYU PATENT PROFESSIONAL CORPORATION et al. (JP)
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