Title:
SINGLE-LAYER AND MULTI-LAYER STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES
Document Type and Number:
WIPO Patent Application WO/2021/050127
Kind Code:
A3
Abstract:
Disclosed herein are configurations and methods to produce very low loss waveguide structures, which can be single-layer or multi-layer. These waveguide structures can be used as a sensing component of a small-footprint integrated optical gyroscope. By using pure fused silica substrates as both top and bottom cladding around a SiN waveguide core, the propagation loss can be well below 0.1db/meter. Low-loss waveguide-based gyro coils may be patterned in the shape of a spiral (circular or rectangular or any other shape), that may be distributed among one or more of vertical planes to increase the length of the optical path while avoiding the increased loss caused by intersecting waveguides in the state-of- the-art designs. Low-loss adiabatic tapers may be used for a coil formed in a single layer where an output waveguide crosses the turns of the spiraling coil.
Inventors:
PANICCIA MARIO (US)
FESHALI AVI (US)
FESHALI AVI (US)
Application Number:
PCT/US2020/036649
Publication Date:
April 22, 2021
Filing Date:
June 08, 2020
Export Citation:
Assignee:
ANELLO PHOTONICS INC (US)
International Classes:
G01C19/04; G01C19/64; G01C19/66; G02B6/12
Foreign References:
US20190101392A1 | 2019-04-04 | |||
US20150226918A1 | 2015-08-13 | |||
US7379633B1 | 2008-05-27 | |||
US20180081115A1 | 2018-03-22 | |||
US20200386944A1 | 2020-12-10 | |||
US20210010811A1 | 2021-01-14 |
Other References:
JARED F BAUTERS; HECK MARTIJN J R; JOHN DEMIS D; BARTON JONATHON S; BRUININK CHRISTIAAN M; LEINSE ARNE; HEIDEMAN RENÉ G; BLUMENTHA: "Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding", OPTICS EXPRESS 19.24, vol. 19, no. 24, 21 November 2011 (2011-11-21), pages 24090 - 2410, XP055721817
Attorney, Agent or Firm:
DATTA, Madhumita et al. (US)
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