Title:
SOLID IMMERSION LENS UNIT AND SEMICONDUCTOR INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/079574
Kind Code:
A1
Abstract:
This solid immersion lens unit is provided with: a solid immersion lens; and a holder which holds the solid immersion lens such that the solid immersion lens is swingable. The solid immersion lens has: a first lens part which is made of a first material; and a second lens part which is made of a second material having a lower refractive index than the first material and which is joined to the first lens part. The first lens part includes: a contact surface which is to be brought into contact with an observation target object; and a first spherical surface which is convex. The second lens part includes: a second spherical surface which is concave and faces the first spherical surface; and a third spherical surface which is convex and is disposed so as to face an objective lens. The holder has a contact part which is configured to be capable of contact with the third spherical surface.
More Like This:
| WO/2002/040974 | MULTI-PHOTON IMAGING INSTALLATION |
| WO/1989/001603 | SCANNING TYPE TUNNEL MICROSCOPE |
Inventors:
NAKAMURA TOMONORI (JP)
ARATA IKUO (JP)
MAO XIANGGUANG (JP)
ARATA IKUO (JP)
MAO XIANGGUANG (JP)
Application Number:
PCT/JP2020/027686
Publication Date:
April 29, 2021
Filing Date:
July 16, 2020
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B21/00; G02B7/02; G02B21/02
Domestic Patent References:
| WO2018110221A1 | 2018-06-21 | |||
| WO2018110221A1 | 2018-06-21 |
Foreign References:
| JP2001076366A | 2001-03-23 | |||
| JP2001311803A | 2001-11-09 | |||
| JP2012048774A | 2012-03-08 |
Other References:
See also references of EP 4050395A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Download PDF: