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Patent Searching and Data


Title:
SONIC TRANSDUCERS BONDED WITH POLYMERS AND METHODS OF MAKING SAME FOR EFFICIENT SONIC ENERGY TRANSFER
Document Type and Number:
WIPO Patent Application WO2003044834
Kind Code:
A3
Abstract:
The present invention contemplates methods of bonding devices that produce sonic energy to polymer articles (Fig. 2B), the bonded articles themselves, methods for fabricating a semiconductor processing apparatus, and the apparatus itself. The present invention provides for an apparatus comprised of polymers, which is not susceptible to corrosion and permit the transmission of sonic energy through the walls of the apparatus. The polymer can be, for example, a fluoropolymer (Fig. 2B).

Inventors:
GOTTSCHALK DOUGLAS A
HOLLWECK MICHAEL JOSEPH
Application Number:
PCT/US2002/037046
Publication Date:
August 14, 2003
Filing Date:
November 19, 2002
Export Citation:
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Assignee:
MATTSON TECHNOLOGY IP (US)
International Classes:
B08B3/12; G10K11/00; H01L21/00; (IPC1-7): H01L21/66
Foreign References:
US5287331A1994-02-15
US5921958A1999-07-13
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