Title:
SPIN-POLARIZATION ION BEAM GENERATOR, SCATTERING SPECTROSCOPE USING THE SPIN-POLARIZATION ION BEAM, AND SPECIMEN PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/069110
Kind Code:
A1
Abstract:
A spin-polarization ion beam generator (30) generates spin-polarization ion
beam with high efficiency by applying circularly- and linearly-polarized pumping
light beams (34, 35) generated by a pumping light generating section (33) from
mutually perpendicular application directions to ions produced by ionizing
metastable atoms in a high-frequency discharge lamp (15). For example, the
generator (30) can generate a polarization helium ion beam having a high spin
polarizability from 18% to 25%. The generator (30) can be used for a processing
apparatus or an analyzer in which an polarized ion beam can be applied to a specimen.
A spin-polarization ion scattering spectroscope can measure the spin state
in the region about two or three atom layer depth of the specimen with an accuracy
higher than conventional in a short measurement time while distinguishing an
element from an atom layer.
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Inventors:
SUZUKI TAKU (JP)
YAMAUCHI YASUSHI (JP)
YAMAUCHI YASUSHI (JP)
Application Number:
PCT/JP2007/073121
Publication Date:
June 12, 2008
Filing Date:
November 29, 2007
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
SUZUKI TAKU (JP)
YAMAUCHI YASUSHI (JP)
SUZUKI TAKU (JP)
YAMAUCHI YASUSHI (JP)
International Classes:
H05H1/46; G01N27/64; H01J27/24; H01J37/08; H01J37/252
Foreign References:
| JP2005259476A | 2005-09-22 |
Other References:
BIXER D.L. ET AL.: "Improved low-energy electron-spin-polarized 4He+ ion source", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 70, no. 1, January 1999 (1999-01-01), pages 240 - 241, XP012036892
L. D. SCHEARER, PHYSICAL REVIEW LETTERS, vol. 22, 1969, pages 629
D. L. BIXLER, REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 70, 1999, pages 240
S. ESSABAA ET AL., NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH, vol. A334, 1994, pages 315 - 318
L. D. SCHEARER ET AL., PHYSICAL REVIEW A, vol. 42, no. 7, 1 October 1990 (1990-10-01), pages 4028 - 4031
C. G. SHULL ET AL., PHYSICAL REVIEW, vol. 84, 1951, pages 912
MAKOTO IMADA; BUTSURI, MEMBERSHIP JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, vol. 55, 2000, pages 20
P. D. JOHNSON ET AL., JOURNAL OF PHYSICS, CONDENSED MATTER, vol. 10, 1998, pages 95
M. ONELLION ET AL., PHYSICAL REVIEW LETTERS, vol. 52, 1984, pages 380
D.P. SMITH, JOUNAL OF APPLIED PHYSICS, vol. 38, 1967, pages 340
W. HAPPER, REVIEW OF MODERN PHYSICS, vol. 44, 1972, pages 169
M. AONO; R. SOUDA, JAPANESE JOUNAL OF APPLIED PHYSICS, vol. 24, 1985, pages 1249
TAKU SUZUKI: "Extended Abstracts of the 53rd Spring Meeting", THE JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, TOKYO, no. 2, 2006, pages 782
R. SOUDA ET AL., SURFACE SCIENCE, vol. 179, 1987, pages 199
L. D. SCHEARER, PHYSICAL REVIEW LETTERS, vol. 22, 1969, pages 629
D. L. BIXLER, REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 70, 1999, pages 240
S. ESSABAA ET AL., NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH, vol. A334, 1994, pages 315 - 318
L. D. SCHEARER ET AL., PHYSICAL REVIEW A, vol. 42, no. 7, 1 October 1990 (1990-10-01), pages 4028 - 4031
C. G. SHULL ET AL., PHYSICAL REVIEW, vol. 84, 1951, pages 912
MAKOTO IMADA; BUTSURI, MEMBERSHIP JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, vol. 55, 2000, pages 20
P. D. JOHNSON ET AL., JOURNAL OF PHYSICS, CONDENSED MATTER, vol. 10, 1998, pages 95
M. ONELLION ET AL., PHYSICAL REVIEW LETTERS, vol. 52, 1984, pages 380
D.P. SMITH, JOUNAL OF APPLIED PHYSICS, vol. 38, 1967, pages 340
W. HAPPER, REVIEW OF MODERN PHYSICS, vol. 44, 1972, pages 169
M. AONO; R. SOUDA, JAPANESE JOUNAL OF APPLIED PHYSICS, vol. 24, 1985, pages 1249
TAKU SUZUKI: "Extended Abstracts of the 53rd Spring Meeting", THE JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, TOKYO, no. 2, 2006, pages 782
R. SOUDA ET AL., SURFACE SCIENCE, vol. 179, 1987, pages 199
Attorney, Agent or Firm:
HIRAYAMA, Kazuyuki (Shinjukugyoen Bldg.2-3-10, Shinjuk, Shinjuku-ku Tokyo 22, JP)
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