Title:
SPINDLE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/153737
Kind Code:
A1
Abstract:
A spindle device (100, 100A, 100B, 100C, 100D, 100E) comprises a rotation shaft (10), a chuck table (20), a hydrostatic gas bearing (30), and a magnetic coupling (40). The rotation shaft has, in an axial direction that is a direction along the center axis of the rotation shaft, a first end (10a) and a second end (10b) that is an end on the opposite side from the first end. The rotation shaft has, at the second end, a flange (11) projecting in a plane orthogonal to the axial direction. The chuck table is attached to the first end, and is in the form of a plate extending in a plane orthogonal to the axial direction. The hydrostatic gas bearing includes a housing (31), a bearing sleeve (32), and flow paths (31e, 33e) inside the housing and the bearing sleeve.
Inventors:
HORIUCHI TERUYOSHI (JP)
Application Number:
PCT/JP2021/045316
Publication Date:
July 21, 2022
Filing Date:
December 09, 2021
Export Citation:
Assignee:
NTN TOYO BEARING CO LTD (JP)
International Classes:
B24B41/06; B23B19/02; B23Q1/01; B23Q1/38; B23Q1/52; F16C23/04; F16C32/06; F16C35/08; F16C35/10; F16D7/02; H01L21/683
Domestic Patent References:
| WO2019054280A1 | 2019-03-21 |
Foreign References:
| JP2002066854A | 2002-03-05 | |||
| JPS56129187U | 1981-10-01 | |||
| JPS54179364U | 1979-12-18 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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