STAGE DEVICE AND CONTROL DEVICE FOR COMBINED STAGE

WIPO Patent Application WO/2018/169006

A1

[Problem] To provide a control device for a stage device in which operation conditions for the device are favorably maintained even when it is difficult to adjust the stage device after installation. [Solution] This stage device including a linearly moving stage 2 is provided with: a stage mechanism 21 that moves a table 24 on a predetermined track; a driving motor 22; a position sensor 34 provided on the table 24; an acceleration sensor 32; a load cell 30; a gyro sensor 33; first to third temperature sensors 36-38; and a motor controller 26. A control unit 39 of the motor controller 26 moves the table 24 by transmitting a position control signal and an acceleration control signal to the motor 22, and when the actual position of the table 24 detected from the position sensor 34 is different from a target position, the position control signal is corrected so that the actual position becomes the target position. In addition, management of the linearly moving stage 2 is performed at an operation terminal 10, which is a control device, by transmitting data of each of the sensors to the operation terminal 10.

OISHI KATSUAKI (JP)
TAKAKURA SATOSHI (JP)
AKAHORI HARUKI (JP)
SAKAGUCHI KEISHI (JP)
TAKEDA YUKI (JP)
NOGUCHI YUKO (JP)

PCT/JP2018/010244

September 20, 2018

March 15, 2018

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SURUGA SEIKI CO LTD (JP)

G05D3/12

JP2008299710A	2008-12-11
JPS5362084A	1978-06-03
JP2003284367A	2003-10-03
JPH0430205A	1992-02-03
JPH1097322A	1998-04-14
JPH10198428A	1998-07-31
JP2009247088A	2009-10-22
CN104097113A	2014-10-15
JP2016078127A	2016-05-16
JP2010231555A	2010-10-14

IP-FOCUS PATENT OFFICE (JP)

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