Title:
STAGE DEVICE, AND SPECIMEN OBSERVATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/002579
Kind Code:
A1
Abstract:
To provide both a stage apparatus having high speed stability in addition to being able to achieve precise positioning as well as a sample observation apparatus such as an optical microscope or a scanning electron microscope equipped with the stage apparatus, the stage apparatus and sample observation apparatus according to the present invention are characterized by correcting either an instructed voltage value of standard waveform data or the output timing of the instructed voltage value, such that the difference between a first time history response for speed or displacement when standard waveform data, which expresses the instructed voltage value for each certain period of time, is used to drive a stage mechanism and a second time history response for speed or displacement for when the speed of the stage mechanism becomes constant is zero, and by having the corrected standard waveform data be driving waveform data output to a driving unit for the stage mechanism.
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Inventors:
MOMOI YASUYUKI (JP)
HANEDA SHIGERU (JP)
SAKAMOTO NAOKI (JP)
SHIBAHARA MASASHI (JP)
TANOKUCHI AKITO (JP)
HANEDA SHIGERU (JP)
SAKAMOTO NAOKI (JP)
SHIBAHARA MASASHI (JP)
TANOKUCHI AKITO (JP)
Application Number:
PCT/JP2013/061009
Publication Date:
January 03, 2014
Filing Date:
April 12, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G05D3/12; G02B21/26; H01J37/20
Foreign References:
| JP2012028281A | 2012-02-09 | |||
| JP2007142093A | 2007-06-07 | |||
| JP2004288918A | 2004-10-14 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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