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Patent Searching and Data


Title:
STRAIN SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/163324
Kind Code:
A1
Abstract:
This strain sensor comprises a film substrate, a strain detection element formed on an upper surface of the film substrate, and a shield film surrounding the periphery of the strain detection element with a space from the strain detection element in a plan view.

Inventors:
ONO TADASHI (JP)
KITAZUME MAKOTO (JP)
ONO AYA (JP)
Application Number:
PCT/JP2022/000343
Publication Date:
August 04, 2022
Filing Date:
January 07, 2022
Export Citation:
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Assignee:
MINEBEA MITSUMI INC (JP)
International Classes:
G01B7/16
Foreign References:
JPH0835808A1996-02-06
JP2005114443A2005-04-28
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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