Title:
STRUCTURES AND METHODS FOR REDUCING POLARIZATION ABERRATION IN OPTICAL SYSTEMS
Document Type and Number:
WIPO Patent Application WO2004019077
Kind Code:
A9
Abstract:
An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
Inventors:
MCGUIRE JAMES P JR
Application Number:
PCT/US2003/026164
Publication Date:
April 08, 2004
Filing Date:
August 21, 2003
Export Citation:
Assignee:
OPTICAL RES ASSOCIATES (US)
International Classes:
G02B5/18; G02B3/00; G02B5/30; G02B9/00; G02B13/14; G02B13/18; G02B13/24; G02B17/08; G02B27/28; G03F7/20; H01L21/027; G02B; (IPC1-7): G02B/
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