Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SUBSTRATE-HOLDING HAND AND SUBSTRATE-CONVEYING ROBOT
Document Type and Number:
WIPO Patent Application WO/2023/145324
Kind Code:
A1
Abstract:
A substrate-holding hand (20) comprises: a plurality of blades (30); a link mechanism (40) that supports the plurality of blades (30); and a force-imparting member (70) that imparts, to the link mechanism (40), a force in a direction that increases a pitch (p) between adjacent blades (40).

More Like This:
Inventors:
KINOSHITA SHINYA
Application Number:
PCT/JP2022/047166
Publication Date:
August 03, 2023
Filing Date:
December 21, 2022
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J15/00; B65G49/07
Domestic Patent References:
WO2013021645A12013-02-14
Foreign References:
JP2018161729A2018-10-18
Attorney, Agent or Firm:
MIYAZONO Hirokazu (JP)
Download PDF: