Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SUBSTRATE OBSERVATION DEVICE, APPLICATION APPARATUS, AND POSITIONING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/054457
Kind Code:
A1
Abstract:
This liquid application apparatus is provided with an observation optical system, a CCD camera (7), a stage control unit (102), an instructed-position determination unit (103), a storage unit (105), and a correction unit (106). The stage control unit (102) positions the observation optical system in an X direction and a Y direction in accordance with an instructed XY coordinates. The instructed-position determination unit (103) determines, as the XY coordinates of an instructed position of the observation optical system, the XY coordinates of an observation object position on a surface of the substrate. The storage unit (105) stores XY correction amounts corresponding to a plurality of positions in the XY plane. The correction unit (106) refers to the XY correction amount corresponding to the observation object position from the storage unit (105), corrects the XY coordinates of the instructed position by using the referred XY correction amount, and gives an instruction of the corrected XY coordinates to the stage control unit (102).

Inventors:
OHBA HIROAKI (JP)
Application Number:
PCT/JP2018/034060
Publication Date:
March 21, 2019
Filing Date:
September 13, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NTN TOYO BEARING CO LTD (JP)
International Classes:
B05C11/00; B05C1/02; B05D1/26; B05D3/00; G01N21/956; G05D3/12; H05K3/00; H05K3/22
Foreign References:
JP2005270800A2005-10-06
CN102078848A2011-06-01
JP2014092397A2014-05-19
JPH09122554A1997-05-13
JP2010073703A2010-04-02
JP2011258922A2011-12-22
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P. C. (JP)
Download PDF: