SUBSTRATE OBSERVATION DEVICE, APPLICATION APPARATUS, AND POSITIONING METHOD

WIPO Patent Application WO/2019/054457

A1

This liquid application apparatus is provided with an observation optical system, a CCD camera (7), a stage control unit (102), an instructed-position determination unit (103), a storage unit (105), and a correction unit (106). The stage control unit (102) positions the observation optical system in an X direction and a Y direction in accordance with an instructed XY coordinates. The instructed-position determination unit (103) determines, as the XY coordinates of an instructed position of the observation optical system, the XY coordinates of an observation object position on a surface of the substrate. The storage unit (105) stores XY correction amounts corresponding to a plurality of positions in the XY plane. The correction unit (106) refers to the XY correction amount corresponding to the observation object position from the storage unit (105), corrects the XY coordinates of the instructed position by using the referred XY correction amount, and gives an instruction of the corrected XY coordinates to the stage control unit (102).

OHBA HIROAKI (JP)

PCT/JP2018/034060

March 21, 2019

September 13, 2018

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NTN TOYO BEARING CO LTD (JP)

B05C11/00; B05C1/02; B05D1/26; B05D3/00; G01N21/956; G05D3/12; H05K3/00; H05K3/22

JP2005270800A	2005-10-06
CN102078848A	2011-06-01
JP2014092397A	2014-05-19
JPH09122554A	1997-05-13
JP2010073703A	2010-04-02
JP2011258922A	2011-12-22

FUKAMI PATENT OFFICE, P.C. (JP)

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