Title:
SUBSTRATE PROCESSING APPARATUS AND ROTARY ELECTRIC CONNECTOR FOR VACUUM
Document Type and Number:
WIPO Patent Application WO/2018/230883
Kind Code:
A1
Abstract:
A substrate processing apparatus according to an embodiment of the present invention comprises: a disc comprising a plurality of electrostatic chucks periodically disposed on a constant radius from a central axis; a disc support for supporting the disc; a DC line electrically connected to the plurality of electrostatic chucks through the disc support; and a power supply for supplying power to the DC line. The DC line comprises: a first DC line passing through the disc support in the power supply; a power distribution unit for distributing the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines connected to each of the plurality of electrostatic chucks in the power distribution unit.
Inventors:
YOON HO BIN (KR)
SHIN SEUNG CHUL (KR)
YOO JIN HYUK (KR)
SHIN SEUNG CHUL (KR)
YOO JIN HYUK (KR)
Application Number:
PCT/KR2018/006511
Publication Date:
December 20, 2018
Filing Date:
June 08, 2018
Export Citation:
Assignee:
JUSUNG ENG CO LTD (KR)
International Classes:
H01L21/683; H01L21/687; H01R39/08; H01R39/18; H01R39/38
Domestic Patent References:
| WO2016126360A1 | 2016-08-11 |
Foreign References:
| KR20170027641A | 2017-03-10 | |||
| KR20170017855A | 2017-02-15 | |||
| JP2011187566A | 2011-09-22 | |||
| KR20160073281A | 2016-06-24 |
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (KR)
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