SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

WIPO Patent Application WO/2018/030357

A1

A substrate processing device that transports a longitudinal sheet substrate in the longitudinal direction and carries out a predetermined process on the sheet substrate, wherein the device is provided with: a processing mechanism that carries out a predetermined process for each portion of the sheet substrate in the longitudinal direction; a transport mechanism that transports the sheet substrate at a predetermined speed in the longitudinal direction while applying a predetermined tensile force to the sheet substrate that passes through the processing mechanism; an anchoring mechanism that is disposed in a specific position along a transport pathway for the sheet substrate and is capable of anchoring the sheet substrate to a specific position; and a control device that, when transport of the sheet substrate is temporarily stopped, controls the transport mechanism to reduce the transport speed of the sheet substrate, and controls the anchoring mechanism so that the sheet substrate is anchored to a specific position at the point in time at which the transport speed reaches a predetermined value or less.

KITO YOSHIAKI (JP)
KATO MASAKI (JP)
NARA KEI (JP)
HORI MASAKAZU (JP)
KIUCHI TOHRU (JP)

PCT/JP2017/028634

February 15, 2018

August 07, 2017

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NIPPON KOGAKU KK (JP)

B65H26/00; B65G49/06; B65H23/188; G03F7/20; G03F7/24; H01L21/677; H01L21/683

JP2000095402A	2000-04-04
JP2004144862A	2004-05-20
JP2005148353A	2005-06-09
JP2000246868A	2000-09-12
JPH06227720A	1994-08-16
JP2010222071A	2010-10-07
JPH11102077A	1999-04-13
JP2003335443A	2003-11-25

CHIBA Yoshihiro et al. (JP)

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