Title:
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/159163
Kind Code:
A1
Abstract:
Provided is a substrate processing device comprising: a substrate holding unit; a substrate rotating unit; a circumferential edge height position measuring unit; a processing-liquid nozzle; a processing-liquid supply unit; a nozzle drive unit; and a control device. The control device executes: a circumferential edge height position measuring step for measuring the circumferential edge height positions via the circumferential edge height position measuring unit; an outer periphery processing step for processing an outer periphery of a main surface of a substrate by discharging a processing liquid from the processing-liquid nozzle toward the outer periphery of the substrate while rotating the substrate around the axis of rotation; and a liquid adhesion-position reciprocating movement step, executed in parallel with the outer periphery processing step, for driving the processing-liquid nozzle such that the processing-liquid nozzles reciprocates while tracking changes in height position of a disposed position circumferential end in order for an adhesion position of the processing liquid from the processing-liquid nozzle on the outer periphery of the substrate to maintain a fixed interval with the disposed position circumferential end, which is a circumferential end in a circumferential direction position where the processing-liquid nozzle is disposed on the peripheral edge of the substrate.
Inventors:
TAKEAKI REI (JP)
ANDO KOJI (JP)
MAEGAWA TADASHI (JP)
ISHII HIROAKI (JP)
YASUTAKE YOSUKE (JP)
ANDO KOJI (JP)
MAEGAWA TADASHI (JP)
ISHII HIROAKI (JP)
YASUTAKE YOSUKE (JP)
Application Number:
PCT/JP2018/002153
Publication Date:
September 07, 2018
Filing Date:
January 24, 2018
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; G03F1/82; H01L21/306
Foreign References:
| JP2015106702A | 2015-06-08 | |||
| JP2016136572A | 2016-07-28 |
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (JP)
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