Title:
SUBSTRATE STORAGE CONTAINER AND FILTER UNIT
Document Type and Number:
WIPO Patent Application WO/2021/020460
Kind Code:
A1
Abstract:
A substrate storage container 1 comprising a container body, a lid body, a seal member, and a filter unit 80 which includes: a ventilating path 801 providing communication between a substrate storage space and a space outside the container body; a filter 85 disposed in the ventilating path 801; and housings 81, 82, 83, 84 forming the ventilating path 801, the filter unit 80 being disposed in the container body and allowing passage of a gas via the filter 85 between the space outside the container body and the substrate storage space. A housing 93 accommodates: a valve body 99 capable of moving between a closing position and an opening position in an outer opening portion 903, the closing position closing the outer opening portion 903 and the opening position opening the outer opening portion 903; a biased member 96 having a tubular shape and connected to the valve body 99, the biased member 96 supported by the housing 93 so as to be movable in the housing 93 and guiding the movement of the valve body 99 so as to move integrally with the valve body 99; and a biasing member 97 biasing the biased member 96 so that the valve body 99 moves to the closing position.
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Inventors:
NARITA YUYA (JP)
INOUE TADATOSHI (JP)
INOUE TADATOSHI (JP)
Application Number:
PCT/JP2020/029110
Publication Date:
February 04, 2021
Filing Date:
July 29, 2020
Export Citation:
Assignee:
MIRAIAL CO LTD (JP)
International Classes:
H01L21/673
Domestic Patent References:
| WO2016002005A1 | 2016-01-07 | |||
| WO2015132910A1 | 2015-09-11 | |||
| WO2017033546A1 | 2017-03-02 |
Foreign References:
| JP2017147372A | 2017-08-24 | |||
| JP2010267761A | 2010-11-25 | |||
| JP2008297046A | 2008-12-11 | |||
| JP2010270823A | 2010-12-02 |
Attorney, Agent or Firm:
SHOBAYASHI Masayuki et al. (JP)
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