Title:
SUBSTRATE TRANSPORTING DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2015/054952
Kind Code:
A1
Abstract:
A substrate transporting device, comprising a cartridge (200) for loading a substrate, and a crane (100) for transporting the cartridge; a first handling chamber (300) and a second handling chamber (400) for handling the cartridge are sequentially disposed in a direction perpendicular to the crane moving direction; a first conveyer belt (501) for moving the cartridge from the first handling chamber to the second handling chamber is disposed between the first handling chamber and the second handling chamber. The crane only needs to transport a cartridge to an input port without further crane handling in the flow, thus reducing transport workload, shortening a substrate production cycle, and improving productivity. Also provided is a substrate transporting method.
Inventors:
CHEN ZENGHONG (CN)
WU CHUN HAO (CN)
LIN KUN HSIEN (CN)
WANG YONGQIANG (CN)
YANG WEIBING (CN)
QI MINGHU (CN)
LI CHENYANGZI (CN)
YANG GUOKUN (CN)
JIANG YUNSHAO (CN)
SHU ZHIYOU (CN)
WU CHUN HAO (CN)
LIN KUN HSIEN (CN)
WANG YONGQIANG (CN)
YANG WEIBING (CN)
QI MINGHU (CN)
LI CHENYANGZI (CN)
YANG GUOKUN (CN)
JIANG YUNSHAO (CN)
SHU ZHIYOU (CN)
Application Number:
PCT/CN2013/089094
Publication Date:
April 23, 2015
Filing Date:
December 11, 2013
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
International Classes:
H01L21/677
Foreign References:
| CN101208454A | 2008-06-25 | |||
| CN1681962A | 2005-10-12 | |||
| CN1674220A | 2005-09-28 | |||
| US20080273957A1 | 2008-11-06 | |||
| JP2004331349A | 2004-11-25 | |||
| KR20090045691A | 2009-05-08 |
Attorney, Agent or Firm:
SHENZHEN STANDARD PATENT & TRADEMARK AGENT LTD. (CN)
深圳市顺天达专利商标代理有限公司 (CN)
深圳市顺天达专利商标代理有限公司 (CN)
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