Title:
SUBSTRATE WORKING MACHINE
Document Type and Number:
WIPO Patent Application WO/2021/199430
Kind Code:
A1
Abstract:
A substrate working machine that performs prescribed work on a substrate, comprising a backup power source that holds backup electric power for if the external supply of electric power is interrupted, and a processing unit that uses the backup electric power to: execute backup processing, in which various types of information are stored in nonvolatile memory, for each type of information; and store timing information pertaining to the interval of time or the time of the backup processing for each type of information in nonvolatile memory.
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Inventors:
ASADA KAZUHIRO (JP)
ITO FUMINORI (JP)
ITO FUMINORI (JP)
Application Number:
PCT/JP2020/015335
Publication Date:
October 07, 2021
Filing Date:
April 03, 2020
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
G11C5/14; G06F1/30
Foreign References:
| JP2010086448A | 2010-04-15 | |||
| JPH04257908A | 1992-09-14 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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