Title:
SUPPORTING STRUCTURE FOR CHEMICAL MECHANICAL POLISHING EQUIPMENT, AND CHEMICAL MECHANICAL POLISHING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2020/143261
Kind Code:
A1
Abstract:
Disclosed are a supporting structure for chemical mechanical polishing equipment and the chemical mechanical polishing equipment. The supporting structure comprises a polishing head frame body (1), wherein the polishing head frame body (1) comprises multiple supports (11) intersecting at the center of the polishing head frame body (1), and a center column (2) located at the center of the polishing head frame body (1) and connected to the polishing head frame body (1); one end, away from the center of the polishing head frame body (1), of each support (11) is connected to an edge supporting piece (3); the edge supporting piece (3) is configured to cooperate with the center column (2) to support the polishing head frame body (1); a working area (8) configured to place a polishing workbench therein is formed between the edge supporting piece (3) and the center column (2); each support (11) is provided with moving rails (12) extending to the center of the polishing head frame body (1); and in the extending direction of each moving rail (12), a gap is formed between the end part of one end, close to the center column (2), of the moving rail (12) and the center column (2) to form a polishing head module replacing area (5). The supporting structure for the chemical mechanical polishing equipment and the chemical mechanical polishing equipment have a simple structure, can disperse the load of the center column, and prolong the service life of the polishing head frame body.
Inventors:
YIN YING (CN)
LI TING (CN)
LIU FUQIANG (CN)
JIA RUOYU (CN)
ZHANG WEIQIANG (CN)
LI TING (CN)
LIU FUQIANG (CN)
JIA RUOYU (CN)
ZHANG WEIQIANG (CN)
Application Number:
PCT/CN2019/111088
Publication Date:
July 16, 2020
Filing Date:
October 14, 2019
Export Citation:
Assignee:
BEIJING SEMICONDUCTOR EQUIPMENT INSTITUTE THE 45TH RES INSTITUTE OF CETC (CN)
International Classes:
B24B37/00; B24B41/02
Foreign References:
| CN109590896A | 2019-04-09 | |||
| CN102211311A | 2011-10-12 | |||
| CN101073878A | 2007-11-21 | |||
| CN106737055A | 2017-05-31 | |||
| CN201186404Y | 2009-01-28 | |||
| CN204382014U | 2015-06-10 | |||
| US7022000B2 | 2006-04-04 |
Attorney, Agent or Firm:
CHOFN INTELLECTUAL PROPERTY (CN)
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