Title:
SURFACE ACOUSTIC WAVE RESONANCE DEVICE, FILTERING DEVICE, AND RADIO FREQUENCY FRONT END DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/036024
Kind Code:
A1
Abstract:
Embodiments of the present invention provide a surface acoustic wave resonance device, a filtering device, and a radio frequency front end device. The surface acoustic wave resonance device comprises: a support layer; a piezoelectric layer that is located above the support layer, the piezoelectric layer comprising a first side and a second side opposite to the first side, and the support layer being located on the first side; a reflective dielectric layer that is located on the first side, located above the support layer, and embedded in the piezoelectric layer; and an electrode layer that is located on the second side and located on the piezoelectric layer. The reflective dielectric layer comprises a first top portion and a first side portion; the first top portion comprises a first concave-convex portion, and the first side portion comprises a second concave-convex portion; and the roughness of the second concave-convex portion is greater than that of the first concave-convex portion. The reflective dielectric layer is located between the piezoelectric layer and the support layer and embedded in the piezoelectric layer, the reflective dielectric layer comprises an irregular concave-convex portion, and bulk acoustic waves generated by the electrode layer are irregularly reflected at the irregular concave-convex portion, such that the bulk acoustic waves reflected to the upper surface of the piezoelectric layer can be reduced, thereby reducing spurious resonance.
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Inventors:
HAN XING (CN)
ZHOU JIAN (CN)
ZHOU JIAN (CN)
Application Number:
PCT/CN2022/116062
Publication Date:
March 16, 2023
Filing Date:
August 31, 2022
Export Citation:
Assignee:
CHANGZHOU CHEMSEMI CO LTD (CN)
International Classes:
H03H9/02; H03H9/64
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
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