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Title:
SURFACE-DIRECTION-TYPE VIBRATION STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2021/079837
Kind Code:
A1
Abstract:
A surface-direction-type vibration structure (1) is provided with: a frame-like member (16) having openings; a vibration part (17) located at the openings; a beam part (181) that connects the frame-like member (16) and the vibration part (17); a piezoelectric film (30) that has a first main surface having a first electrode (31) formed thereon and a second main surface having a second electrode (32) formed thereon and that is vibrated in a surface direction by applying voltage to the first electrode (31) and the second electrode (32); a first support part (12) that connects the frame-like member (16) and the first main surface and supports the piezoelectric film (30); a second support part (13) that connects the vibration part (17) and the first main surface and supports the piezoelectric film (30); a wiring member (58) that has a wire for applying the voltage to the first electrode (31) and the second electrode (32); a first conductive member (56) that connects the first electrode (31) and the wire; and a second conductive member (57) that connects the second electrode (32) and the wire. Further, the wiring member (58) is in contact with the first main surface at a predetermined contact part (500), and the first conductive member is, in a plan view, disposed between the first support part (12) and the contact part (500).

Inventors:
ENDO JUN (JP)
OTERA SHOZO (JP)
ISHIURA YUTAKA (JP)
Application Number:
PCT/JP2020/039203
Publication Date:
April 29, 2021
Filing Date:
October 19, 2020
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
B06B1/06; G06F3/01; G06F3/041; H01L41/053; H01L41/09; H01L41/193
Domestic Patent References:
WO2019013164A12019-01-17
WO2017057656A12017-04-06
WO2019111775A12019-06-13
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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