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Patent Searching and Data


Title:
SYSTEM AND METHOD FOR PREVENTING STATIC ELECTRICITY GENERATION BY MEANS OF POSITIONAL ATTENUATION TIME MEASUREMENT
Document Type and Number:
WIPO Patent Application WO/2020/189995
Kind Code:
A1
Abstract:
A method for preventing static electricity generation by means of positional attenuation time measurement according to an embodiment of the present invention comprises the steps in which: (a) a control terminal unit receives system settings input via a settings window displayed by means of a display; (b) the control terminal unit generates a voltage generation signal and a voltage measurement signal and transmits same to an automatic voltage controller; (c) the automatic voltage controller transmits the voltage measurement signal and voltage generation signal, respectively, to a plurality of voltage measuring devices and a plurality of voltage generating devices positioned together in different places in a space in which a target facility is positioned, and receives voltage measurement data; (d) the control terminal unit calculates attenuation time by means of time information received together with the voltage measurement data from the automatic voltage controller; (e) the control terminal unit compares the lengths of the calculated attenuation time calculated in step (d) and reference attenuation time set in step (a); and (f) the control terminal unit controls an output of an ionizer if the calculated attenuation time is longer (slower) than the reference attenuation time. Therefore, the present invention can notably reduce the defect rate of a product due to static electricity in a semiconductor manufacturing process or other electronic or electrical device manufacturing processes.

Inventors:
LEE JI WON (KR)
Application Number:
PCT/KR2020/003587
Publication Date:
September 24, 2020
Filing Date:
March 16, 2020
Export Citation:
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Assignee:
J TAPIENS (KR)
International Classes:
H05F3/06
Foreign References:
JP2012186148A2012-09-27
KR100349514B12002-08-21
KR20120049780A2012-05-17
JPH09278411A1997-10-28
JP2006196378A2006-07-27
Attorney, Agent or Firm:
SHIM, Kyoung-Shik et al. (KR)
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