Title:
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER
Document Type and Number:
WIPO Patent Application WO/2020/068107
Kind Code:
A8
Abstract:
A method for optimizing delivery of power to a plasma chamber is described. The method includes dividing each cycle of a low frequency (LF) radio frequency generator (RFG) into multiple time intervals. During each of the time intervals, a frequency offset of a high frequency (HF) RFG is generated for which the delivery of power is maximized. The frequency offsets provide a substantially inverse relationship compared to a voltage signal of the LF RFG for each cycle of the voltage signal. The frequency offsets for the time intervals are multiples of the low frequency. The substantially inverse relationship facilitates an increase in the delivery of power to the electrode. A total range of the frequency offsets from a reference HF frequency over the LF RF cycle depends on a power ratio of power that is supplied by the LF RFG and power that is supplied by the HF RFG.
Inventors:
BHOWMICK RANADEEP (US)
HOLLAND JOHN (US)
KOZAKEVICH FELIX (US)
JI BING (US)
MARAKHTANOV ALEXEI (US)
HOLLAND JOHN (US)
KOZAKEVICH FELIX (US)
JI BING (US)
MARAKHTANOV ALEXEI (US)
Application Number:
PCT/US2018/053383
Publication Date:
April 08, 2021
Filing Date:
September 28, 2018
Export Citation:
Assignee:
LAM RES CORP (US)
International Classes:
H01J37/32
Attorney, Agent or Firm:
PATEL, Nishitkumar, V. et al. (US)
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