TAKE-UP-TYPE CONTINUOUS FILM-FORMING APPARATUS

WIPO Patent Application WO/2012/086119

A1

The present invention is provided with: a vacuum chamber (2); a pair of film-forming rolls (3, 3), which are disposed in the vacuum chamber (2) in attitudes parallel or substantially parallel to each other such that the axis cores are in the front-rear direction of the vacuum chamber (2); and a film-forming source (4) that forms a film on the surface of a sheet-like base material (W), which is wound on the pair of film-forming rolls (3, 3) in such a manner that the base material traverses from one film-forming roll (3) to the other film-forming roll (3). The vacuum chamber (2) has: a cylindrical chamber main body (10) with the left side and the right side opened, said chamber main body having front and rear wall portions (6, 7), and upper and lower wall portions (8, 9); and left and right side walls (11, 12), which are connected to the vacuum chamber such that the left and right opening of the chamber main body (10) can be opened and closed. In the front and rear wall portions (6, 7) and/or upper and lower wall portions (8, 9) of the chamber main body (10), a gateway section (30) is provided, said gateway section making it possible to have an operator go in and go out from an inter-roll region (Ms) between the pair of film-forming rolls (3, 3).

JPH0830271	[Title of Invention] Thin film forming apparatus
JPH08134646	ION BEAM PROCESSING DEVICE
JP2007131955	APPARATUS FOR FORMING BARRIER FILM ON INNER SURFACE OF PLASTIC CONTAINER, AND METHOD FOR MANUFACTURING PLASTIC CONTAINER WITH BARRIER FILM-COATED INNER SURFACE

KUROKAWA YOSHINORI
TAMAGAKI HIROSHI

PCT/JP2011/006364

June 28, 2012

November 15, 2011

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KOBE STEEL LTD (JP)
KUROKAWA YOSHINORI
TAMAGAKI HIROSHI

C23C14/56; C23C14/00; C23C16/44; C23C16/54

WO2010024187A1

2010-03-04

JP2010519417A	2010-06-03
JPH11350136A	1999-12-21
JP2006299417A	2006-11-02
JPS5921662U	1984-02-09
JP2008311328A	2008-12-25
JP2008138229A	2008-06-19

E.YADIN: "New Multi-drum Web Coaters for Sputtering Deposition", 15TH INTERNATIONAL VACUUM WEB COATING CONFERENCE, 2001, pages 1 - 5
REINER KUKLA: "Flexible Electronics Muke Web Coating Sochi 'Applied SmartWeb'", ELECTRONIC MATERIALS AND PARTS, vol. 49, no. 3, 1 March 2010 (2010-03-01), pages 65 - 68

KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)

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