Title:
TEMPERATURE CONTROL DEVICE, TEMPERATURE CONTROL METHOD, AND INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2021/014724
Kind Code:
A1
Abstract:
This temperature control device for controlling the temperature of an object that is subject to temperature control is provided with: a heating mechanism which has a heat source for heating said object subject to temperature control; a temperature measuring instrument for measuring the peripheral temperature of said object subject to temperature control; a temperature estimation unit for dynamically estimating the temperature of said object subject to temperature control on the basis of power inputted to the heat source, power supplied to said object subject to temperature control, and the peripheral temperature; and a temperature controller for performing control on the temperature of said object subject to temperature control by controlling the power inputted to the heat source on the basis of the estimated temperature of said object subject to temperature control.
More Like This:
JPH096160 | HEATING DEVICE AND IMAGE FORMING DEVICE |
JPH10270151 | HEATING APPARATUS |
Inventors:
KASAI SHIGERU (JP)
KOBAYASHI MASAHITO (JP)
KOBAYASHI MASAHITO (JP)
Application Number:
PCT/JP2020/019796
Publication Date:
January 28, 2021
Filing Date:
May 19, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G05D23/19; H01L21/66
Foreign References:
JP4703850B2 | 2011-06-15 | |||
JP2018151369A | 2018-09-27 | |||
JPH10135315A | 1998-05-22 |
Attorney, Agent or Firm:
TAKAYAMA Hiroshi (JP)
Download PDF:
Previous Patent: REFRIGERATION DEVICE AND OIL COOLING DEVICE
Next Patent: TRAIN OPERATION ASSISTANCE SYSTEM AND TRAIN OPERATION ASSISTANCE METHOD
Next Patent: TRAIN OPERATION ASSISTANCE SYSTEM AND TRAIN OPERATION ASSISTANCE METHOD