Title:
TEMPLATE FOR NANOIMPRINTING, METHOD FOR PRODUCING SAME, AND TWO-STAGE MESA BLANK AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2019/198668
Kind Code:
A1
Abstract:
The present invention provides a template (10) for nanoimprinting, which is characterized by being provided with a light-transmitting base material that has a base part (21) and a mesa structure (22) that is provided on a main surface (21a) of the base part (21), and which is also characterized in that: a main surface (22a) of the mesa structure (22) is provided with a transfer pattern (30) of a recessed and projected structure and a pattern (40) for marking the recessed and projected structure; a high contrast film (50) is provided on a bottom surface (42a) of a recess of the pattern (40) for marking; and a tantalum oxide film (60) is provided on the surface of the high contrast film (50) so as to cover the high contrast film (50).
Inventors:
CHOU HIDEKI (JP)
NAGAI TAKAHARU (JP)
ICHIMURA KOJI (JP)
SUZUKI KATSUTOSHI (JP)
NAGAI TAKAHARU (JP)
ICHIMURA KOJI (JP)
SUZUKI KATSUTOSHI (JP)
Application Number:
PCT/JP2019/015332
Publication Date:
October 17, 2019
Filing Date:
April 08, 2019
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
H01L21/027; B29C33/38; B29C59/02
Domestic Patent References:
| WO2017057263A1 | 2017-04-06 |
Foreign References:
| JP2009200505A | 2009-09-03 | |||
| JP2018056545A | 2018-04-05 | |||
| JP2018014483A | 2018-01-25 | |||
| JP2015065443A | 2015-04-09 | |||
| JP2011082514A | 2011-04-21 | |||
| JP2011049554A | 2011-03-10 | |||
| JP2009023113A | 2009-02-05 | |||
| JP2017022417A | 2017-01-26 | |||
| JP2015012034A | 2015-01-19 | |||
| JP2014011254A | 2014-01-20 |
Attorney, Agent or Firm:
YAMASHITA, Akihiko et al. (JP)
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