Title:
TFT SUBSTRATE, SCANNING ANTENNA PROVIDED WITH TFT SUBSTRATE AND METHOD FOR PRODUCING TFT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/079350
Kind Code:
A1
Abstract:
This TFT substrate (105) is provided with: a gate metal layer (3) which comprises a gate electrode (3G) and a patch electrode (3PE) of a TFT (10); a gate insulating layer (4) which is formed on the gate metal layer and has a first opening (4a) that reaches the patch electrode; a source metal layer (7) which is formed on the gate insulating layer and comprises a source electrode (7S), a drain electrode (7D) and a drain extension part (7de) extended from the drain electrode of the TFT; an interlayer insulating layer (11) which is formed on the source metal layer and has a second opening (11a) that overlaps the first opening when viewed from the normal direction of a dielectric substrate (1) and a third opening (11b) that reaches the drain extension part; and a conductive layer (19) which is formed on the interlayer insulating layer and comprises a patch-drain connection part (19a). The patch-drain connection part is in contact with the patch electrode within the first opening, while being in contact with the drain extension part within the third opening.
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Inventors:
MISAKI KATSUNORI
Application Number:
PCT/JP2017/037578
Publication Date:
May 03, 2018
Filing Date:
October 17, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L29/786; H01L21/336; H01Q3/36; H01Q3/44; H01Q13/22
Foreign References:
| JP2000022428A | 2000-01-21 | |||
| JP2009538565A | 2009-11-05 | |||
| JP2014531843A | 2014-11-27 | |||
| JPH04234202A | 1992-08-21 | |||
| JP2000196334A | 2000-07-14 |
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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