Title:
TFT SUBSTRATE, SCANNING ANTENNA PROVIDED WITH TFT SUBSTRATE, AND METHOD FOR MANUFACTURING TFT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/159389
Kind Code:
A1
Abstract:
A TFT substrate (106) is provided with: a transmission/reception region (R1) that includes a plurality of antenna unit regions (U); and a non-transmission/reception region (R2) that is positioned in a region other than the transmission/reception region. Each of the antenna unit regions has a TFT (10), and a patch electrode (15) that is electrically connected to a drain electrode (7D) of the TFT. The TFT substrate has a gate metal layer (3) that includes a gate electrode (3G) of the TFT, a gate insulating layer (4), a source metal layer (7) that includes a drain electrode and a source electrode (7S) of the TFT, a first insulating layer (11), a patch metal layer (15l) that includes a patch electrode, a second insulating layer (17), and an upper conductive layer (19). The upper conductive layer includes a patch drain connection part (19a) that is electrically connected to the patch electrode and the drain electrode.
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Inventors:
MISAKI KATSUNORI
Application Number:
PCT/JP2018/006013
Publication Date:
September 07, 2018
Filing Date:
February 20, 2018
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L29/786; G02F1/13; G02F1/1343; G02F1/1368; H01Q3/34; H01Q3/44; H01Q13/22; H01Q21/06
Domestic Patent References:
| WO2016130383A1 | 2016-08-18 | |||
| WO2015126550A1 | 2015-08-27 |
Foreign References:
| JP2014531843A | 2014-11-27 | |||
| JP2007295044A | 2007-11-08 | |||
| JP2011076079A | 2011-04-14 |
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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