Title:
THERMAL CONDUCTIVITY ESTIMATION METHOD, THERMAL CONDUCTIVITY ESTIMATION DEVICE, PRODUCTION METHOD FOR SEMICONDUCTOR CRYSTAL PRODUCT, THERMAL CONDUCTIVITY COMPUTATION DEVICE, THERMAL CONDUCTIVITY COMPUTATION PROGRAM, AND, THERMAL CONDUCTIVITY COMPUTATION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/110796
Kind Code:
A1
Abstract:
A thermal conductivity estimation method comprising: a step in which a portion of a measurement sample is heated under a prescribed heating condition, and a surface temperature distribution of the measurement sample in a steady state is measured; a step in which a heat transfer simulation is executed for a plurality of combinations of the heating condition and a provisional thermal conductivity of a sample model having the same form as the measurement sample, and the surface temperature distribution of the sample model is calculated for each combination; a step in which a regression model is generated using a machine learning method, in which the plurality of combinations and calculation results for the temperature distributions obtained from said plurality of combinations is set as training data, an input is set as a measurement sample surface temperature distribution, and an output is set as the thermal conductivity of the measurement sample; and, a step in which a measurement sample surface temperature distribution measurement result is input into the regression model, and the thermal conductivity of the measurement sample is estimated.
Inventors:
YOKOYAMA RYUSUKE (JP)
FUJIWARA TOSHIYUKI (JP)
HIGUCHI YUSUKE (JP)
UJIHARA TORU (JP)
FUJIWARA TOSHIYUKI (JP)
HIGUCHI YUSUKE (JP)
UJIHARA TORU (JP)
Application Number:
PCT/JP2019/045041
Publication Date:
June 04, 2020
Filing Date:
November 18, 2019
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
G01N25/18; C30B35/00
Foreign References:
| JP2010275170A | 2010-12-09 | |||
| JP2006064413A | 2006-03-09 | |||
| JPH08211946A | 1996-08-20 | |||
| JP2018169818A | 2018-11-01 |
Other References:
ZHANG, LIGIANG ET AL.: "Inverse identification of interfacial heat transfer coefficient between the casting and metal mold using neural network", ENERGY CONVERSION AND MANAGEMENT, vol. 1, no. 10, 19 March 2010 (2010-03-19), pages 1898 - 1904, XP027057102
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
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