Title:
THIN-FILM FORMATION DEVICE AND THIN-FILM FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/061451
Kind Code:
A1
Abstract:
This thin-film formation device, which forms a thin film on the surface of a substrate, is provided with the following: a supply unit that supplies, to the surface of the substrate, droplets of a solvent that contains a material that forms the thin film; a shape-changing unit that changes the shapes of the droplets on the surface of the substrate so as to extend from one direction to another direction; and a removal unit that removes the solvent from the droplets extending from the aforementioned one direction to the aforementioned other direction.
Inventors:
MIYAJI AKIRA (JP)
NARA KEI (JP)
KOIZUMI SHOHEI (JP)
MIYAMOTO KENJI (JP)
NARA KEI (JP)
KOIZUMI SHOHEI (JP)
MIYAMOTO KENJI (JP)
Application Number:
PCT/JP2013/076813
Publication Date:
April 24, 2014
Filing Date:
October 02, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
H01L21/368; B05D3/12; G02F1/13; H01L21/336; H01L29/786; H01L51/50; H05B33/10
Domestic Patent References:
| WO2011040155A1 | 2011-04-07 |
Foreign References:
| JP2009295678A | 2009-12-17 | |||
| JP2007294704A | 2007-11-08 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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