Title:
THIN FILM MATERIAL SURFACE ACOUSTIC WAVE DEVICE WITH GS LAYERED ELECTRODE, PREPARATION METHOD THEREFOR AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2021/103579
Kind Code:
A1
Abstract:
Disclosed are a thin film material surface acoustic wave device with a GS layered electrode, a preparation method therefor and the use thereof. The device sequentially comprises a substrate, a first layer of interdigital transducer, a silica thin film, a piezoelectric thin film and a second layer of interdigital transducer from bottom to top. The preparation method therefor comprises the following steps: 1) using a photoetching technique and an electron beam evaporation method to prepare the first layer of interdigital transducer on the surface of the substrate; 2) growing a silica thin film on the first layer of interdigital transducer and substrate by using a magnetron sputtering method; 3) leveling the surface of the silica thin film, and then growing a piezoelectric thin film on the surface thereof by using the magnetron sputtering method; and 4) preparing the second layer of interdigital transducer on the piezoelectric thin film by using the method in step 1), and aligning the second layer of interdigital transducer with the first layer of interdigital transducer according to settings, and exposing the electrode PAD area of the first layer of interdigital transducer by using the photoetching technique so as to obtain the device. The present invention has a higher frequency and a higher temperature stability, and also has a stronger integration performance.
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Inventors:
PAN FENG (CN)
SHEN JUNYAO (CN)
ZENG FEI (CN)
FU SULEI (CN)
SU RONGXUAN (CN)
WANG WEIBIAO (CN)
SHEN JUNYAO (CN)
ZENG FEI (CN)
FU SULEI (CN)
SU RONGXUAN (CN)
WANG WEIBIAO (CN)
Application Number:
PCT/CN2020/102273
Publication Date:
June 03, 2021
Filing Date:
July 16, 2020
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
SHOULDER ELECTRONICS LTD (CN)
SHOULDER ELECTRONICS LTD (CN)
International Classes:
H03H9/02; H03H3/02
Foreign References:
| CN110868181A | 2020-03-06 | |||
| JPS5467792A | 1979-05-31 | |||
| JPS5467792A | 1979-05-31 | |||
| CN110113025A | 2019-08-09 | |||
| US20050206272A1 | 2005-09-22 | |||
| JP2004153364A | 2004-05-27 | |||
| CN103336051A | 2013-10-02 |
Attorney, Agent or Firm:
JEEKAI&PARTNERS (CN)
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