Title:
THIN FILM TRANSISTOR AND PREPARATION METHOD THEREFOR, ARRAY SUBSTRATE AND PREPARATION METHOD THEREFOR, AND DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2021/088912
Kind Code:
A1
Abstract:
A thin film transistor and a preparation method therefor, an array substrate and a preparation method therefor, and a display panel. The preparation method for the thin film transistor comprises: forming an active layer (2) comprising a first area (21), a second area (22), and a third area (23) on a substrate (1); forming a gate insulation layer (3) on the side of the active layer (2) furthest from the substrate (1); forming a gate electrode (4) on the side of the gate insulation layer (3) furthest from the active layer (2), the orthographic projection of the first area (21) of the active layer (2) on the substrate (1) not overlapping the orthographic projections of the gate insulation layer (3) and the gate electrode (4) on the substrate (1), the orthographic projection of the second area (22) of the active layer (2) on the substrate (1) overlapping the orthographic projection of the gate insulation layer (3) on the substrate (1) but not overlapping the orthographic projection of the gate electrode (4) on the substrate (1), and the orthographic projection of the third area (23) of the active layer (2) on the substrate (1) overlapping both the orthographic projections of the gate insulation layer (3) and the gate electrode (4) on the substrate (1); and implanting ions into the active layer (2) from the side of the gate electrode (4) facing away from the active layer (2), such that the first area (21) forms a heavily doped area, the second area (22) forms a lightly doped area, and the third area (23) forms an active area.
Inventors:
CHENG HONGFEI (CN)
Application Number:
PCT/CN2020/126674
Publication Date:
May 14, 2021
Filing Date:
November 05, 2020
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
BEIJING BOE TECHNOLOGY DEV CO LTD (CN)
BEIJING BOE TECHNOLOGY DEV CO LTD (CN)
International Classes:
H01L21/336; H01L21/77; H01L27/12; H01L29/06; H01L29/786
Foreign References:
| CN109950320A | 2019-06-28 | |||
| CN1527381A | 2004-09-08 | |||
| US7763479B2 | 2010-07-27 | |||
| CN109616479A | 2019-04-12 | |||
| CN106952963A | 2017-07-14 | |||
| CN103779206A | 2014-05-07 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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