Title:
TRANSFER METHOD AND TRANSFER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2016/056117
Kind Code:
A1
Abstract:
After a part (P) vacuum-chucked by a vacuum chucking nozzle (51) has been moved in the XY directions towards target XY coordinates (S120-S140), the waveform of Y-direction oscillation (oscillation waveform) occurring in the part (P) after reaching the vicinity of the target XY coordinates is measured (S150, S160), and at a timing at which displacement y of the part (P) crosses a node of the measured waveform, the movement in the Z direction is controlled such that the part (P) reaches a target Z coordinate (value: 0) (S170-S210). In so doing, misalignment of the mounting location can be further minimized, even in instances in which the part (P) is moved in the Z direction and mounted onto a substrate (S) while oscillation still persists subsequent to movement of the part (P) in the XY directions.
Inventors:
NAGATA RYO (JP)
FUJITA MASATOSHI (JP)
FUJITA MASATOSHI (JP)
Application Number:
PCT/JP2014/077165
Publication Date:
April 14, 2016
Filing Date:
October 10, 2014
Export Citation:
Assignee:
FUJI MACHINE MFG (JP)
International Classes:
B25J13/00; G05D19/02
Foreign References:
| JPH06166489A | 1994-06-14 | |||
| JP2001092511A | 2001-04-06 | |||
| JP2014052763A | 2014-03-20 | |||
| JP2012196749A | 2012-10-18 | |||
| JP2001001378A | 2001-01-09 |
Other References:
See also references of EP 3205457A4
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
Patent business corporation Itec international patent firm (JP)
Patent business corporation Itec international patent firm (JP)
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