Title:
TRANSMISSIVE AND REFLECTIVE DIGITAL HOLOGRAPHIC MICROSCOPY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/241875
Kind Code:
A1
Abstract:
A transmissive and reflective digital holographic microscopy system in the technical field of microscopy, the system comprising a reflective digital holographic microscopy optical path and a transmissive digital holographic microscopy optical path. The reflective digital holographic microscopy optical path is: a first light beam (1a) passes through a first polarizer (2), changes polarization direction, and is divided into two beams of polarized perpendicular light waves, horizontally polarized light being transmitted through a polarizing beam-splitter cube (3) to form an object light optical path reflected by a sample (8), and vertically polarized light being reflected by the polarizing beam-splitter cube (3) to form a reference light optical path reflected by the sample (8). The transmissive digital holographic microscopy optical path is: a second light beam (1b) passes through a second polarizer (14), changes polarization direction, and is divided into two beams of polarized perpendicular light waves, vertically polarized light being reflected by the polarizing beam-splitter cube (3) to form an object light optical path transmitted by the sample (8), and horizontal polarized light being transmitted through the polarizing beam-splitter cube (3) to form a reference light optical path transmitted by the sample (8). Thus, the thickness and surface profile of the sample (8) can be measured at the same time.
Inventors:
ZHANG XUHUI (CN)
SHEN WENJING (CN)
SHEN WENJING (CN)
Application Number:
PCT/CN2021/099209
Publication Date:
November 24, 2022
Filing Date:
June 09, 2021
Export Citation:
Assignee:
UNIV SHENZHEN TECHNOLOGY (CN)
International Classes:
G02B21/00; G02B21/04; G03H1/00
Foreign References:
| CN214666619U | 2021-11-09 | |||
| CN108168425A | 2018-06-15 | |||
| CN110857908A | 2020-03-03 | |||
| CN110108201A | 2019-08-09 | |||
| CN107966110A | 2018-04-27 | |||
| CN205384406U | 2016-07-13 | |||
| CN207798024U | 2018-08-31 | |||
| CN105241374A | 2016-01-13 | |||
| CN109443234A | 2019-03-08 | |||
| US20190250104A1 | 2019-08-15 |
Attorney, Agent or Firm:
PRECISE INTELLECTUAL PROPERTY FIRM (CN)
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