Title:
TRANSPARENT CONDUCTIVE FILM AND TRANSPARENT CONDUCTIVE FILM LAMINATE, PROCESSES FOR PRODUCTION OF SAME, AND SILICON THIN FILM SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2010/104111
Kind Code:
A1
Abstract:
Provided are: a transparent conductive film which exhibits excellent resistance to the reduction caused by hydrogen and excellent light-trapping effect and which is useful in producing a high-efficiency silicon thin film solar cell; a transparent conductive film laminate using the same; processes for the production of the film and the laminate; and a silicon thin film solar cell in which the film or the laminate is used as the electrode. The transparent conductive film is characterized by comprising zinc oxide as the main component and containing at least one additional metal element selected from between aluminum and gallium in an amount satisfying relationship (1), and by exhibiting a surface roughness (Ra) of 35.0nm or more and a surface resistance of 65Ω/□ or lower.
-[Al] + 0.30 ≤ [Ga] ≤ -2.68 × [Al] + 1.74 (1)
[wherein [Al] is the aluminum content expressed in terms of Al/(Zn+Al) atomic ratio (%), while [Ga] is the gallium content expressed in terms of Ga/(Zn+Ga) atomic ratio (%)]
Inventors:
ABE YOSHIYUKI (JP)
NAKAYAMA TOKUYUKI (JP)
NAKAYAMA TOKUYUKI (JP)
Application Number:
PCT/JP2010/054004
Publication Date:
September 16, 2010
Filing Date:
March 10, 2010
Export Citation:
Assignee:
SUMITOMO METAL MINING CO (JP)
ABE YOSHIYUKI (JP)
NAKAYAMA TOKUYUKI (JP)
ABE YOSHIYUKI (JP)
NAKAYAMA TOKUYUKI (JP)
International Classes:
C23C14/08; C23C14/34; C23C14/58; H01B5/14; H01B13/00; H01L31/04
Domestic Patent References:
| WO2008062685A1 | 2008-05-29 |
Foreign References:
| JP2003115599A | 2003-04-18 | |||
| JP2009010108A | 2009-01-15 | |||
| JP2002260448A | 2002-09-13 | |||
| JP2005347490A | 2005-12-15 | |||
| JP2002222972A | 2002-08-09 | |||
| JP2004311968A | 2004-11-04 | |||
| JP2007329109A | 2007-12-20 |
Other References:
K. SATO ET AL.: "Hydrogen Plasma Treatment of ZnO-Coated TCO Films", PROC. OF 23TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, 1993, pages 855 - 859
MINAMI: "Large-Area Milkey Transparent Conducting Al-Doped ZnO Films Prepared by Magnetron Sputtering", JAPANESE JOURNAL OF APPLIED PHYSICS, 1992, pages 1106 - 1109
J. MULLER, THIN SOLID FILMS, vol. 392, 2001, pages 327
See also references of EP 2407575A4
MINAMI: "Large-Area Milkey Transparent Conducting Al-Doped ZnO Films Prepared by Magnetron Sputtering", JAPANESE JOURNAL OF APPLIED PHYSICS, 1992, pages 1106 - 1109
J. MULLER, THIN SOLID FILMS, vol. 392, 2001, pages 327
See also references of EP 2407575A4
Attorney, Agent or Firm:
KAWABI Kenji (JP)
Kenji Kawabi (JP)
Kenji Kawabi (JP)
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