Title:
TRENCH CAPACITOR AND TRENCH CAPACITOR PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/085573
Kind Code:
A1
Abstract:
Provided are a trench capacitor and a trench capacitor production method which can achieve a reduction in the equivalent series resistance. This trench capacitor 1 is provided with: a base material 10 which has a trench 11 extending in the vertical direction from a top surface 10a; and an MIM structure 20 which has a plurality of conductive layers (lower electrode layer 22 and upper electrode layer 23) and a dielectric layer 21 sandwiched between the plurality of conductive layers. The plurality of conductive layers each have a first portion 22R1, 23R1 that is located outside the trench 11 and extends along the top surface 10a, and a second portion 22R2, 23R2 that is located inside the trench 11 and extends along the wall surfaces 13 of the trench 11. The thickness 23T1 of the first portion 23R1 of the upper electrode layer 23 is greater than the thickness 23T2 of the second portion 23R2 of the upper electrode layer 23.
Inventors:
AOYAGI YOSHIO (JP)
SUEMASA RIKI (JP)
SUEMASA RIKI (JP)
Application Number:
PCT/JP2020/040726
Publication Date:
May 06, 2021
Filing Date:
October 29, 2020
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
H01G13/00; H01G4/30; H01G4/33
Foreign References:
| US20130130053A1 | 2013-05-23 | |||
| JP2003297942A | 2003-10-17 | |||
| JP2006500772A | 2006-01-05 | |||
| JPH09219500A | 1997-08-19 |
Attorney, Agent or Firm:
MURAKOSHI Satoshi (JP)
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