Title:
TUBULAR SAPPHIRE MEMBER, HEAT EXCHANGER, SEMICONDUCTOR MANUFACTURING DEVICE AND METHOD FOR MANUFACTURING TUBULAR SAPPHIRE MEMBER
Document Type and Number:
WIPO Patent Application WO/2018/181981
Kind Code:
A1
Abstract:
A tubular sapphire member of the present disclosure is provided with: an outer wall which is a tubular body made of sapphire and extends in an axial direction; a plurality of through-holes extending in the axial direction; and one or more partition walls which extend in the axial direction and divide the plurality of through-holes, wherein the axial direction is parallel to a c-axis of sapphire, and in a front view as seen in the axial direction, at least one of the partition walls extends from the center axis toward the outer wall and comes into contact with the outer wall. The extending direction of the partition walls is parallel to any one among an a-axis and an m-axis of the sapphire.
Inventors:
SAKANO ICHIRO (JP)
YUKIHIRO KEIJI (JP)
YUKIHIRO KEIJI (JP)
Application Number:
PCT/JP2018/013831
Publication Date:
October 04, 2018
Filing Date:
March 30, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
C30B29/20; C30B15/34; F28F1/40; F28F21/00
Domestic Patent References:
| WO2017196952A1 | 2017-11-16 |
Foreign References:
| JP2016088820A | 2016-05-23 | |||
| JPS5826097A | 1983-02-16 | |||
| JPH07165485A | 1995-06-27 | |||
| JP2003327495A | 2003-11-19 | |||
| JPS5826097A | 1983-02-16 | |||
| JP2004525852A | 2004-08-26 |
Other References:
See also references of EP 3604630A4
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