Title:
ULTRASONIC AGITATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/163222
Kind Code:
A1
Abstract:
Provided is an ultrasonic agitation device that can suitably agitate a solution on a substrate without damaging the substrate even if a delicate substrate is used, that can suitably agitate the solution even if the solution is present on both surfaces of the substrate, and that can be applied to roll-to-roll processing. Provided is an ultrasonic agitation device that conveys a long substrate in the lengthwise direction while agitating a solution on the substrate, the ultrasonic agitation device having a first ultrasonic vibrator which is disposed facing the front surface of the substrate and which transmits ultrasonic vibration through the medium of a gas and a second ultrasonic vibrator which is disposed facing the rear surface of the substrate and which transmits ultrasonic vibration through the medium of a gas, wherein the center location of a vibration surface of the second ultrasonic vibrator, when viewed from a direction perpendicular to the main plane of the substrate, is disposed downstream of the center location of a vibration surface of the first ultrasonic vibrator in the conveyance direction of the substrate.
Inventors:
IWASE EIJIRO (JP)
UCHIUMI KYOHISA (JP)
UCHIUMI KYOHISA (JP)
Application Number:
PCT/JP2021/047317
Publication Date:
August 04, 2022
Filing Date:
December 21, 2021
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B05C9/12; B05B15/00; B05B16/00; B05C11/00; B05C15/00
Foreign References:
| JP2005144414A | 2005-06-09 | |||
| JPH081076A | 1996-01-09 | |||
| JP2004130309A | 2004-04-30 | |||
| JP2016058157A | 2016-04-21 | |||
| JP2013136029A | 2013-07-11 | |||
| JPH0985154A | 1997-03-31 |
Attorney, Agent or Firm:
ITOH Hideaki et al. (JP)
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