Title:
ULTRAVIOLET-LIGHT CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/258461
Kind Code:
A1
Abstract:
Provided in the present application is an ultraviolet-light cleaning device. In the ultraviolet-light cleaning device, by means of arranging an energy conversion member between an ultraviolet light source and a bearing platform, the energy conversion member converts energy of ultraviolet light into specific energy, and when the amount of energy of the ultraviolet light is large, the energy of the ultraviolet light is converted into the specific energy, the amount of energy of which is lower than the amount of energy of the ultraviolet light, such that a substrate is prevented from being damaged while the substrate is cleaned, and the technical problem of existing ultraviolet-light cleaning whereby a substrate is damaged during a cleaning process is solved.
Inventors:
GAO PAN (CN)
Application Number:
PCT/CN2019/100688
Publication Date:
December 30, 2020
Filing Date:
August 15, 2019
Export Citation:
Assignee:
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
B08B7/00; A61L2/10
Domestic Patent References:
| WO2010107720A2 | 2010-09-23 |
Foreign References:
| CN1306864A | 2001-08-08 | |||
| CN103210057A | 2013-07-17 | |||
| CN103328609A | 2013-09-25 | |||
| CN1282277A | 2001-01-31 | |||
| CN108343871A | 2018-07-31 | |||
| US4867796A | 1989-09-19 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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