Title:
VACUUM DEVICE WHERE POWER SUPPLY MECHANISM IS MOUNTED AND POWER SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2006/006263
Kind Code:
A1
Abstract:
A contact condition between a rotary electrode placed in a vacuum tank and a power supply mechanism for supplying power by being in contact with the rotary electrode is improved. A vacuum device comprising a vacuum tank, a rotary electrode placed in the vacuum tank in an electrically insulated state, and a power supply mechanism for supplying power by being in contact with the rotary electrode, wherein the rotary electrode has an annular shape, rotates horizontally relative to the central axis of the annular shape, the power supply mechanism has an electrode member, and the electrode member and the rotary electrode are in contact with each other at at least one contact surface.
Inventors:
TAKIMOTO MASAYUKI (JP)
KOMURO HIROYUKI (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
AONAHATA KAZUHITO (JP)
KOMURO HIROYUKI (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
AONAHATA KAZUHITO (JP)
Application Number:
PCT/JP2005/000852
Publication Date:
January 19, 2006
Filing Date:
January 24, 2005
Export Citation:
Assignee:
SHOWA SHINKU KK (JP)
TAKIMOTO MASAYUKI (JP)
KOMURO HIROYUKI (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
AONAHATA KAZUHITO (JP)
TAKIMOTO MASAYUKI (JP)
KOMURO HIROYUKI (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
AONAHATA KAZUHITO (JP)
International Classes:
C23C14/24; H01R39/00; (IPC1-7): C23C14/24; H01R39/00
Foreign References:
| JPS59206174A | 1984-11-21 | |||
| JPS54158643A | 1979-12-14 | |||
| JP2001073136A | 2001-03-21 |
Attorney, Agent or Firm:
Okabe, Masao (Fuji Bldg. 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo, JP)
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