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Title:
VACUUM DRYING APPARATUS
Document Type and Number:
WIPO Patent Application WO/1992/020984
Kind Code:
A1
Abstract:
An object of the present invention is to effectively dry products in large quantities and products continuously supplied without lowering the conventional production speed, and the present invention is characterized in that a product preheating means by use of hot air is provided in a vacuum vessel incorporating therein a heater, so that products such as printed boards and electronic parts after water-cleaned are dried. In the case of batch type, a suction port and a blow-out port are penetratingly provided in a vacuum vessel incorporating therein a heater, the suction port and the blow-out port are allowed to communicate with each other through a pipe provided outside the vacuum vessel and a gas flow device and a gas heating device are provided in the pipe. In the case of the continuously treating type, the vacuum vessel incorporating therein the heater is provided on one of the conveyors serially disposed, a hot air blow-out device is provided on a conveyor positioned on the upstream side of the conveyor provided with the vacuum vessel. A plurality of vacuum vessels are provided in parallel to one another, and, by alternately switching the vacuum vessels, the time required for vacuum drying can be extended regardless of the supplying speed of a product.

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Inventors:
KAWAKAMI OSAMU (JP)
TSURUTA KAICHI (JP)
Application Number:
PCT/JP1992/000657
Publication Date:
November 26, 1992
Filing Date:
May 22, 1992
Export Citation:
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Assignee:
NIKKU IND CO (JP)
SENJU METAL INDUSTRY CO (JP)
International Classes:
F26B3/30; F26B5/04; F26B23/04; H01L21/027; H05K3/22; (IPC1-7): F26B1/00; F26B5/04; F26B7/00; H01L21/304
Foreign References:
JPH0250071A1990-02-20
JPS4833001A1973-05-07
JPH01226157A1989-09-08
JPH01193584A1989-08-03
JPS63302521A1988-12-09
JPS6254443A1987-03-10
JPS5112904A1976-01-31
JPS5044545A1975-04-22
JPS61165579A1986-07-26
JPH01235604A1989-09-20
JPS532923B21978-02-01
JPS5122807A1976-02-23
JPS403668B1
Other References:
See also references of EP 0539607A4
Attorney, Agent or Firm:
Ogawa, Shin-ichi (Noguchi & Saika International Patent Office Pelican Building, 3-3, Nishi-shinbashi 3-chom, Minato-ku Tokyo 105, JP)
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