VACUUM PROCESSING APPARATUS

WIPO Patent Application WO/2020/144891

A1

The present invention provides a technique whereby dust generation during conveyance of a substrate holder can be suppressed in a vacuum processing apparatus for conveying a plurality of substrate holders along a conveyance path formed so that the projected shape thereof on a vertical surface is a continuous ring shape. The present invention has, in a vacuum tank 2 which has a conveyance path formed so that the projected shape thereof on a vertical surface is a continuous ring shape, and in which in which a single vacuum atmosphere is formed, an anti-sag member 35 assembled to a first drive part 36 provided on the outside with respect to the conveyance direction of the conveyance path. A travel roller 54 of the anti-sag member 35 travels while being guided and supported by a guide part 17 which is provided below a return-path-side conveyance part 33c positioned on the lower side of a substrate holder conveyance mechanism 3 and which extends in a second conveyance direction P2, and the first drive part 36 is configured so as to come in contact with a first driven part 12 of a substrate holder 11 and drive the substrate holder 11 along the conveyance path in the second conveyance direction P2.

TAKAGI DAI (JP)
MIZUSHIMA YUU (JP)
KOIZUMI TOSHIYUKI (JP)

PCT/JP2019/034451

July 16, 2020

September 02, 2019

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ULVAC INC (JP)

C23C14/56; B65G17/06; B65G17/48; B65G49/07; C23C14/50; H01L21/677

WO2018230592A1	2018-12-20
WO2017104826A1	2017-06-22

JP2011104757A	2011-06-02
JP2009114502A	2009-05-28
JPH01312072A	1989-12-15

ABE Hideki et al. (JP)

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